News

14 November 2008

 

OIPT receives order for six systems

Oxford Instruments Plasma Technology (OIPT) of Yatton, UK has received an order for six systems to equip the Molecular Foundry at the Lawrence Berkeley National Laboratory (Berkeley Lab). The order includes: three ICP Plasma etch systems, two Plasmalab80Plus tools, and a FlexAL atomic layer deposition tool.

Located in California, the Molecular Foundry is a U.S. Department of Energy (DOE) national user facility for nanoscience researchers in academic, government and industrial laboratories around the world. The facility provides users with instruments, techniques and collaborators to enhance their studies of the synthesis, characterisation and theory of nanoscale materials.

“We are delighted to receive this order from such a prestigious established customer, which underlines the importance we place on providing market-leading process technologies,” said Mark Vosloo, OIPT’s sales director.

OIPT’s systems will enable users at the facility to utilize plasma based etching and deposition to pursue pioneering research in nanoscience, says the firm. Furthermore, the ICP systems and FlexAL have new capabilities tailored to Berkeley Lab’s specific research requirements.

Berkeley Lab will use the new systems for applications such as etching of micro and nanoscale silicon features with ultra-smooth sidewalls, pattern transfer of sub-20 nm features and beyond, plasma etching for nanoimprint ithography templates and printing, and sub-nanometer control of conformal film deposition.

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Search: OIPT ALD Etch

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