Contact Details:

Oxford Instruments
 North End, Yatton, Bristol, BS49 4AP, UK
Tel: +44 (0)1934 837000
Fax: +44 (0)1934 837001
oxford-instruments.com


Company Profile: Oxford Instruments


Process tools and leading-edge processes for the precise, controllable and repeatable etching, deposition and growth of micro and nano structures.

 

Plasma Etch & Deposition

Plasma product family capable of ICP, RIE, PECVD, ICP-CVD and sputtering in a wide range of etch and deposition applications and processes.



 

Atomic Layer Deposition

Versatile product family of ALD systems offering both thermal and plasma atomic layer deposition




Compound Semiconductor Templates

TDI, a wholly owned subsidiary of Oxford Instruments, is a world leader in the development of Hydride Vapour Phase Epitaxy (HVPE) processes and techniques for the production of novel compound semiconductors such as GaN, AlN, AlGaN, InN, InGaN.


 

Ion Beam Etch & Deposition

Ionfab® product family offering a versatile etch and deposition platform for a wide range of materials.



 

Nanoscale Growth Systems

High performance growth of nanowires and nanotubes with in-situ catalyst activation and rigorous process control.

 

 

www.oxford-instruments.com

 

Contact details: Worldwide Sales and Customer Support offices

UK

North End, Yatton, Bristol, BS49 4AP
Tel: +44 (0)1934 837000
Fax: +44 (0)1934 837001
Email: [email protected]

Germany

Wiesbaden
Tel: +49 (0)6122 937 161
Fax: +49 (0)6122 937 175
Email: [email protected]

Japan

Tokyo
Tel: +81 3 5245 3261
Fax: +81 3 5245 4466
Email: [email protected]

PR China

Beijing
Tel: +86 10 6518 8160/1/2
Fax: +86 10 6518 8155
Email: [email protected]

 

USA

Concord, MA
TOLLFREE +1 800 447 4717
Tel: +1 978 369 9933
Fax: +1 978 369 8287
Email: [email protected]

Singapore

Tel: +65 6337 6848
Fax: +65 6337 6286
Email: [email protected]

 

Shanghai

Tel: +86 21 6360 8530
Fax: +86 21 6360 8535
Email: [email protected]