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28 June 2006
Tokyo Electron America orders BedeMetrix-L for SiC and SiGe
Bede X-ray Metrology has received an order for its BedeMetrix-L metrology system from Tokyo Electron America Inc, Austin, USA. The process control system will be used to
investigate leading-edge front end materials, such as SiC and SiGe.
Anthony Dip, process manager, Tokyo Electron America Inc, said: “X-ray metrology is more important than ever in helping semiconductor manufacturers to fully understand their materials and processes. For Tokyo Electron as a thin film equipment provider, the BedeMetrix-L system is the best solution to enable us to analyse important advanced
materials, using parameters that are essential for device functionality at our customers’ new technology nodes.”
Visit: http://www.bede.com
Contact: [email protected]
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