News: Suppliers
17 February 2021
Park Systems showcases NX-TSH high-resolution, automated tip scanning head
Park Systems Inc, world-leading manufacturer of atomic force microscopes (AFMs), is showcasing its newly launched Park NX-TSH, the only automated tip scan head for large sample analysis over 300mm, at the SEMI Technology Unites Global Summit (15-19 February 2021). The Park NX-TSH is for large and heavy sample flat-panel display glass, 2D encoder sample and features conductive AFM for electric defect analysis by integrating a micro probe station.
The tip scanning head (TSH) is an automated moving tip head for industrial AFM measurements on large samples over 300mm, developed for OLED, LCD and photonics for large sample analysis. The automated tip scan head moves on an air-bearing stage technology and combines the x, y, z scanners moving directly to the desired point on the substrate. The automated tip scan head moves on an air-bearing stage technology combining the x, y, z scanners and moving directly to the desired point on the substrate.
“Park NX-TSH was developed specifically for manufacturers setting up fabs to produce next-generation flat-panel displays with the objective to overcome the 300mm size threshold limit,” states Keibock Lee, Park Systems’ president. “Using conductive AFM, Park NX TSH measures the sample surface with an optional probe station that contacts the sample surface and provides current into small devices or chips.”
The automated tip scanning system overcomes nano metrology challenges with a gantry-style tip scanner system that moves directly to a place on the sample and produces high-resolution images of the roughness measurement, step height measurement, critical dimension measurement and sidewall measurement.
“Park Systems has scaled up their AFM tools for Gen10+ and all large flat-panel displays using Park NX-TSH (tip scanning head) system, and is the only automated tip scan head for large sample analysis over 300mm,” adds Lee.
The sample is fixed on a sample chuck and the tip scanning head attached to the gantry moves to measurement positions on the surface sample. The tip scanning head system overcomes the limitations of sample size and weight since the sample is fixed on the sample chuck.
Atomic force microscopy is the most accurate, and non-destructive, method of measuring samples at nanoscale and, with the Park NX-TSH, reliable, high-resolution AFM images can be obtained on OLEDs, LCDs, photomasks and more in a gantry-style bridge system, improving productivity and quality.
Visit the Park Systems Booth at the SEMI Technology Unites Global Conference to meet with reps online or send an [email protected].
