31 March 2011

MV launches vacuum foreline traps for HB-LED and solar cell manufacturing

The MV Products division of Mass-Vac Inc of North Billerica, MA, USA is introducing a line of vacuum foreline traps for manufacturing processes that create large volumes of solid by-products.

Specifically, MV Vacuum Inlet Traps are suited to metal-organic chemical vapor deposition (MOCVD), hydride vapor phase epitaxy (HVPE), plasma-enhanced chemical vapor deposition (PECVD) and low-pressure chemical vapor deposition (LPCVD) processes used in manufacturing solar cells, high-brightness light-emitting diodes (HB-LEDs), and Li-ion batteries, which generate high volumes of particulates. Offered in several models to accommodate different manufacturing process applications and volume requirements, they can incorporate a wide range of filters for trapping solids, organic solvents and other contaminants and protecting vacuum pump systems from oil back-streaming.

Featuring user-selectable filter elements, MV Vacuum Inlet Traps include the MV Multi-Trap, which has a knock-down stage plus two stages of filter elements and is capable of up to 2500 cubic inches (40,968cm3) of solids accumulation, and the Posi-Trap for applications up to 50 cubic feet (1,415,842cm3) per minute (CFM). Both models are offered in several sizes, with stainless-steel, copper gauze, molecular sieve, activated charcoal, pleated polypropylene (2, 5 and 20µm pore sizes) and Sodasorb filters.

Tags: MOCVD HVPE PECVD HB-LEDs Solar cells

Visit: www.massvac.com

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