News

21 September 2009

 

OIPT wins three-system order from Melbourne Centre for Nanofabrication

UK-based etch and deposition equipment maker Oxford Instruments Plasma Technology (OIPT) has just received an order for three systems (two Plasmalab System100 ICP380 tools and a Plasmalab System100 PECVD tool) from the new Melbourne Centre for Nanofabrication (MCN) in Australia as part of a program to equip their cleanrooms for nano- and micro-scale fabrication.

MCN is the Victoria node of the Australian National Fabrication facility (ANFF), a collaborative initiative between the Australian federal government, the Victoria state government, Australia's Commonwealth Scientific and Industrial Research Organisation (CSIRO), and major Victoria universities (Monash University, the University of Melbourne, Swinburne University, Deakin University, La Trobe University and RMIT University).

MCN’s ultimate purpose is to fill the gap in Australia for open-access, multi-scale fabrication infrastructure, spanning a range of fabrication environments and materials.

Oxford Instruments claims that the flexibility of its tools was an important criterion in MCN’s choice of OIPT as a strategic partner.

OIPT also recently equipped new cleanroom facilities for Saudi Arabia’s King Abdullah University of Science and Technology (KAUST), California’s Lawrence Berkeley National Laboratory (LBNL), and the UK’s Southampton University, notes the firm's sales director Mark Vosloo.

Search: OIPT PECVD

Visit: www.nano.monash.edu

Visit: www.oxford-instruments.com