News

14 May 2009

 

Tegal France established as DRIE R&D center and European hub

Tegal Corp of Petaluma, CA, USA, which makes plasma etch and deposition equipment for the fabricating MEMS, power ICs and optoelectronic devices, has established the subsidiary Tegal France, with offices in the Haute Savoie capital of Annecy.

The move completes the transition associated with last September’s acquisition of the deep reactive ion etching (DRIE) products and related intellectual property for 3D packaging and MEMS devices from France-based Alcatel Micro Machining Systems (AMMS) and Alcatel Lucent.

With staff composed of engineers from the former AMMS operation and led by general manager/R&D director Nicolas Launay (former R&D director at AMMS in Annecy), Tegal France constitutes Tegal’s European hub and the center of its advanced DRIE product development initiatives. Launay reports to Tegal’s CEO Thomas Mika.

The AMMS acquisition boosts Tegal’s technology portfolio and provides new opportunities in the MEMS and power device markets, where Tegal is well entrenched. It also provides access to large and fast-growing new markets such as thru-silicon vias (TSVs) for 3D IC packaging. Joint development programs (JDPs) and consortium programs in which AMMS was actively involved continue under Tegal’s ownership.

“It makes excellent business sense to focus our development activities in this European location,” says Mika. “Through the former AMMS team, we already enjoy an entrenched position with close proximity to key customers and access to technology talent from premier universities,” he adds. “We are very pleased to formalize the new R&D infrastructure, where we will continue to innovate advanced DRIE solutions.”

The new R&D infrastructure provides the resources to broaden the application reach of the DRIE technology and expand its served markets, says Launay. “With our many combined years of etch technology development and process expertise within both the Tegal and the AMMS product families, we believe we can offer powerful new solutions to leading semiconductor manufacturers, especially those working on new-generation 3D packaging applications,” he adds.

See related item:

Tegal doubles revenue and halves loss, boosted by AMMS acquisition

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