News

7 August 2009

 

k-Space develops next generation temperature monitoring system

k-Space Associates Inc of Dexter, MI, USA says it has developed its kSA BandiT product line with new technology. In addition to the existing band-edge based temperature capability for semiconductors, kSA BandiT can now simultaneously determine surface temperature directly from a sample’s Blackbody emission. This new, patent pending approach, collects sample radiation across a broad spectral range and fits this curve to Planck’s equation in real-time.

“Having Blackbody capability integrated within kSA BandiT now removes any past limitations on temperature monitoring with a band-edge only approach,” says Darryl Barlett, k-Space’s VP and general manager. “The two techniques are quite complimentary.”

kSA BandiT is not affected by changing viewport coating, stray IR light sources, reactor maintenance or system emissivity changes, adds the firm.

Figure: Real-Time Blackbody temperature monitoring of germanium substrate at 500 degrees.

In addition to temperature monitoring, the latest kSA BandiT system also includes capabilities for monitoring sample thickness, growth rate, surface roughness, and optical band gap properties. Integration of other kSA product technology such as kSA MOS 2D thin-film stress is now possible with advanced optical hardware solutions for almost any deposition chamber.

The firm says that its next generation kSA BandiT has already been selected by many MBE and MOCVD facilities worldwide. Configurations are available for all commercial MBE, MOCVD, and custom deposition systems.

See: k-Space Company Profile

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Visit: www.k-space.com