Contact Details:

LayTec AG

Seesener Str. 10 - 13, 10709 Berlin, Germany
T: +49 30 89 00 55 0
F: +49 30 89 00 55 180
www.laytec.de

LayTec AG

LayTec is a major provider of integrated metrology for thin-film deposition and other high value generating processes. LayTec’s equipment is used in a broad range of applications like optoelectronics, electronics, PV, displays, optics and photonics, SEMI and flash memory production, automotive industry and others. LayTec’s integrated metrology tools provide access to all key parameters during deposition processes in real-time – either in-situ during the process or in-line during substrate transfer between deposition chambers.

LayTec’s metrology is used in industry and development worldwide and offers unique benefits: process deviations are quickly identified and corrected, development cycles are accelerated, the transfer and ramp-up of established processes to new lines is facilitated and conditions are easily re-established after maintenance. In combination with LayTec’s software packages for SPC (statistical process control) and APC (advanced process control), this all adds up to fab-wide optimization of processes and film quality, better production efficiency, high yields and reduced costs. In addition, LayTec metrology tools are of crucial importance in the R&D labs of research organizations where new materials, processes and device structures are developed.

In-situ metrology for LEDs, lasers and CPV

EpiCurve® TT: flat wafers by strain engineering

LayTec’s EpiCurve® TT monitors simultaneously wafer curvature, emissivity-corrected pyrometry and growth rate/thickness by three-wavelength reflectance. This tool helps avoid cracks, achieve flat wafers and control temperature homogeneity. Every curvature tool can be equipped with Advanced Resolution curvature measurements for wafer bow asphericity control.

Pyro 400: Direct access to GaN and SiC temperature

Pyro 400 provides precise real surface temperature measurements of GaN on sapphire and of SiC, and enables direct growth control of InGaN MQW layers. In addition to in-situ ultraviolet (UV) pyrometry, the second generation of the tool – Pyro 400 Gen 2 – includes real-time UV emissivity correction for enhanced accuracy of GaN surface temperature during growth of more complex LED structures.

In-line metrology for photovoltaic, OLED/OPV, display, touch panel and glass coating industries

SolR® for thin-film solar cell manufacturing

SolR® monitors properties and thicknesses of all layers throughout thin-film solar cell manufacturing processes like transparent conducting oxide (TCO) and absorber and buffer layers. SolR® is used in thin-film solar cell production, in particular in CIGS, CdTe and a-Si-based production lines. It is designed to be integrated into typical in-line and roll-to-roll processes and is applicable to all major types of substrates and PV cell designs.

X Link: control of cross-linking in the blink of an eye

The X Link system enables fast, automated, non-destructive and accurate evaluation of the level of EVA or polyolefin cross-linking immediately after lamination. It can be integrated into any solar module production line, offering 100% coverage for process and quality control.

Find further in-situ and in-line metrology tools at www.laytec.de/products or contact [email protected].